This module discusses the uses of ion implantation, the ion implantation process, its key equipment and process parameters, and its advantages and disadvantages.
At the end of this lesson, the learner will be able to identify:
- the purpose of ion implantation
- the process of ion implantation
- other ion implantation applications
- various components of an ion implanter
- three key quality characteristics of ion implantation
- key equipment and process parameters
- advantages and disadvantages of ion implantation
There are no prerequisites for this course.
TopicsAdvantages and disadvantages of ion implantation +Key equipment and process parameters +Other ion implantation applications +The process of ion implantation +The purpose of ion implantation +Three key quality characteristics of ion implantation +Various components of an ion implanter
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