SCP005 – 8.00 Hours

Currently there are no scheduled classes for this course. However, in some cases a course can be scheduled to meet your organization’s specific needs. For more information about this course or to schedule a class, please contact Business & Cyber Solutions at or bcs@teex.tamu.edu to get the latest schedule.

Course Description

The seminar on Ion Implantation provides an overview of equipment issues, process parameters and key quality control issues. Emphasis is placed on the advantages of ion implantation types of source elements used, selection of the proper ion species, maintenance of high vacuum on the implanter, beam focusing, scanning systems, and end point detection. Process issues related to silicon crystal orientation, channeling, trench processing, implant depth, metrology, and post implant annealing are included. Download the in-depth course description.

Prerequisites

There are no prerequisites for this course.

Attendance Requirements

To meet attendance requirements, participants must review each training module and complete all required course assignments, activities, quizzes, and/or end of course exam.

Topics

  • Annealing methods
  • Implant depth
  • Implantation process
  • Introduction to ion implantation
  • Ion implantation equipment and sub assemblies
  • Masking
  • Material considerations
  • Process control
  • Scanning techniques
  • Source compounds

Suggested Audience

Those of all skill levels having an interest in an introduction to ion implantation processes.

Other Information

Please call customer service at 1-800-541-7149 for more information or email us at ke@teex.tamu.edu

Contact Information

Business & Cyber Solutions
Phone: (979) 431-4837 | Toll-Free:
Email: bcs@teex.tamu.edu

I thought this course was great and provided very useful information. I’m very glad that I was able to attend and am eager to apply some of the things I learned to better prepare out university for these types of situations.

— Managing Critical Incidents at Institutes of Higher Education
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