This course is designed for the Semiconductor Processing Industry to provide professional development for a broad audience of employees working for semiconductor manufacturers and suppliers. It is one of a series of overview courses developed to cover process issues for each major semiconductor processing step. This particular course stresses the fundamentals of current processes used in wet/dry etch. While the course is technical in nature it does not focus on specific process related information. It provides a broad overview of the wet/dry etch process and the general principles that are involved. The course also assists participants in understanding in general terms the potential relationship of wet/dry etch to the upstream and downstream processes in the Semiconductor Industry.
Semiconductor Processing Overview Course offered through TEEX or course equivalent.
Class attendance is an essential part of the education process and participants in TEEX courses are expected to attend all class sessions and field exercises. This course requires participants to attend a minimum of 80% of the class hours as a component of successful course completion. During the course, your instructor will review any additional attendance requirements, for example a field exercise that cannot be missed.
TopicsIntroduction to semiconductor processing steps+Introduction to etching and it's purpose+Introduction to the two types of etching and their uses+Introduction to the two types of etching and their uses+Wet etching processes+Dry (plasma) etching processes+Dry etch of silicon processes+Dry etch of metals and silicides+Dry etch of metals and silicides+Photoresist ashing
All skill levels having an interest in an introduction to the wet/dry etch process and those who require a broad overview of the specific process. This course would assist support staff, equipment operators, entry-level technicians, process and equipment maintenance technicians, entry-level engineers and new hire professional staff in understanding the wet/dry etch process.
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