DescriptionThis course is one of a series of overview courses designed to cover process issues for each major semiconductor processing step. This course stresses the fundamentals of current processes used in photolithography.
PrerequisitesA basic knowledge of the following is presumed:
- Semiconductor Processing Overview
- Classical Physics
TopicsAlignment, exposure and development +Introduction to photolithography and the basic properties of light and optics +Masks and reticles +Surface preparation and coating process
Suggested AudienceAll skill levels having an interest in an introduction to photolithography processes.
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